Eric Goodwin on Interferometry, Optics, and Metrology

Eric Goodwin wrote the Field Guide to Interferometric Testing, and now is the Director of Optical Sciences at Nikon Research Corporation of America. In his work, he has undoubtedly worked on cutting edge optical systems and products, providing him a unique insight into delivering reliable solutions at the forefront of optical products. Eric discusses his deep background in optical metrology and testing, and additionally shares insights regarding managing complex optics projects and teams. Lastly, I had the pleasure of sharing stories with Eric regarding our own experiences working with Dr. Barrett and Dr. Greivenkamp.

References:

  1. ā Field Guide to Interferometric Optical Testing ā 

  2. ā Nikon Optics Researchā 

  3. ā Campbell, E W, Phillion, D W, and Sommargren, G E. Sub-nanometer interferometry for aspheric mirror fabrication. United States: N. p., 1999. Web.ā 

  4. ā H H Chuaqui and E S Wyndham 1984 J. Phys. E: Sci. Instrum. 17 268ā 

  5. ā R. N. Smartt and W. H. Steel 1975 Jpn. J. Appl. Phys. 14 351ā 

It looks like the link is directing to the episode with Joel. Is the latest one just not uploaded yet?
This looks like a great one! Thanks for sharing.

Yep, should go live at 830 am and the link will point to the right one then! Apparently it just directs to the latest episode otherwise.

I loved the episode, thank you! Where can I find out more about the grating-encoder technique for stage placement in lithography that Eric talks about? When I was an intern at Zygo way back in 2006, trying to figure out the turbulence issue for linear displacement measuring interferometers was problem number one.
Thanks,
Alan

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@AlanG Eric stated that there were no journal articles he was aware of, but did share this patent as a reference (see attached).
USP 10,378,933.pdf (1.1 MB)

Thank you, Iā€™ll check it out